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LED array and camera controlling for Fourier Ptychographic Topography / Reflection-mode Intensity Diffraction Tomography

Abstract

Topography measurement is essential for surface characterization, semiconductormetrology, and inspection applications. To date, performing high-throughput and accuratetopography remains challenging due to the trade-off between field-of-view (FOV) and spatialresolution. Here we demonstrate a novel topography technique based on the reflection-mode Fourier ptychographic microscopy, termed Fourier ptychograhpic topography (FPT). We show that FPT provides both a wide FOV and high resolution, and achieves nanoscale height reconstructionaccuracy. Our FPT prototype is based on a custom-built computational microscope consisting of programmable brightfield and darkfield LED arrays.

This repo contains the controlling code for The Imaging Source (TIS) camera and the LED arrays.

Citation

If you find this project useful in your research, please consider citing our paper:

Wang, H., Zhu, J., Sung, J., Hu, G., Greene, J., Li, Y., Park, S., Kim, W., Lee, M., Yang, Y., & Tian, L. (2023). Fourier ptychographic topography. Optics Express, 31(7), 11007. https://doi.org/10.1364/oe.481712

Acknowledgement

Our code is based on the code and documentation of these following repos. Please also give credit to them if you find the related part is useful to you!

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