diff --git a/packages/nx/src/daemon/server/project-graph-incremental-recomputation.ts b/packages/nx/src/daemon/server/project-graph-incremental-recomputation.ts
index 81f4830135ff7..4e3d569f8b546 100644
--- a/packages/nx/src/daemon/server/project-graph-incremental-recomputation.ts
+++ b/packages/nx/src/daemon/server/project-graph-incremental-recomputation.ts
@@ -316,7 +316,11 @@ async function processFilesAndCreateAndSerializeProjectGraph(
         serializedSourceMaps: null,
       };
     } else {
-      writeCache(g.projectFileMapCache, g.projectGraph);
+      writeCache(
+        g.projectFileMapCache,
+        g.projectGraph,
+        projectConfigurationsResult.sourceMaps
+      );
       return g;
     }
   } catch (err) {
diff --git a/packages/nx/src/project-graph/nx-deps-cache.ts b/packages/nx/src/project-graph/nx-deps-cache.ts
index 6b03530cb39b6..2c5d236403e6e 100644
--- a/packages/nx/src/project-graph/nx-deps-cache.ts
+++ b/packages/nx/src/project-graph/nx-deps-cache.ts
@@ -18,6 +18,7 @@ import {
 } from '../utils/fileutils';
 import { PackageJson } from '../utils/package-json';
 import { nxVersion } from '../utils/versions';
+import { ConfigurationSourceMaps } from './utils/project-configuration-utils';
 
 export interface FileMapCache {
   version: string;
@@ -34,6 +35,8 @@ export const nxProjectGraph = join(
 );
 export const nxFileMap = join(workspaceDataDirectory, 'file-map.json');
 
+export const nxSourceMaps = join(workspaceDataDirectory, 'source-maps.json');
+
 export function ensureCacheDirectory(): void {
   try {
     if (!existsSync(workspaceDataDirectory)) {
@@ -102,6 +105,31 @@ export function readProjectGraphCache(): null | ProjectGraph {
   return data ?? null;
 }
 
+export function readSourceMapsCache(): null | ConfigurationSourceMaps {
+  performance.mark('read source-maps:start');
+  ensureCacheDirectory();
+
+  let data = null;
+  try {
+    if (fileExists(nxSourceMaps)) {
+      data = readJsonFile(nxSourceMaps);
+    }
+  } catch (error) {
+    console.log(
+      `Error reading '${nxSourceMaps}'. Continue the process without the cache.`
+    );
+    console.log(error);
+  }
+
+  performance.mark('read source-maps:end');
+  performance.measure(
+    'read cache',
+    'read source-maps:start',
+    'read source-maps:end'
+  );
+  return data ?? null;
+}
+
 export function createProjectFileMapCache(
   nxJson: NxJsonConfiguration<'*' | string[]>,
   packageJsonDeps: Record<string, string>,
@@ -123,7 +151,8 @@ export function createProjectFileMapCache(
 
 export function writeCache(
   cache: FileMapCache,
-  projectGraph: ProjectGraph
+  projectGraph: ProjectGraph,
+  sourceMaps: ConfigurationSourceMaps
 ): void {
   performance.mark('write cache:start');
   let retry = 1;
@@ -137,6 +166,7 @@ export function writeCache(
     const unique = (Math.random().toString(16) + '0000000').slice(2, 10);
     const tmpProjectGraphPath = `${nxProjectGraph}~${unique}`;
     const tmpFileMapPath = `${nxFileMap}~${unique}`;
+    const tmpSourceMapPath = `${nxFileMap}~${unique}`;
 
     try {
       writeJsonFile(tmpProjectGraphPath, projectGraph);
@@ -144,6 +174,9 @@ export function writeCache(
 
       writeJsonFile(tmpFileMapPath, cache);
       renameSync(tmpFileMapPath, nxFileMap);
+
+      writeJsonFile(tmpSourceMapPath, sourceMaps);
+      renameSync(tmpSourceMapPath, nxSourceMaps);
       done = true;
     } catch (err: any) {
       if (err instanceof Error) {
diff --git a/packages/nx/src/project-graph/project-graph.ts b/packages/nx/src/project-graph/project-graph.ts
index 69e37c6fa70c8..63691973dbc4d 100644
--- a/packages/nx/src/project-graph/project-graph.ts
+++ b/packages/nx/src/project-graph/project-graph.ts
@@ -25,6 +25,7 @@ import {
 import {
   readFileMapCache,
   readProjectGraphCache,
+  readSourceMapsCache,
   writeCache,
 } from './nx-deps-cache';
 import { ConfigurationResult } from './utils/project-configuration-utils';
@@ -170,7 +171,7 @@ export async function buildProjectGraphAndSourceMapsWithoutDaemon() {
     throw new ProjectGraphError(errors, projectGraph, sourceMaps);
   } else {
     if (cacheEnabled) {
-      writeCache(projectFileMapCache, projectGraph);
+      writeCache(projectFileMapCache, projectGraph, sourceMaps);
     }
     return { projectGraph, sourceMaps };
   }
@@ -280,7 +281,16 @@ export async function createProjectGraphAndSourceMapsAsync(
         'Waiting for graph construction in another process to complete'
       );
       await lock.wait();
-      return { projectGraph: readCachedGraphAndHydrateFileMap() };
+      const sourceMaps = readSourceMapsCache();
+      if (!sourceMaps) {
+        throw new Error(
+          'The project graph was computed in another process, but the source maps are missing.'
+        );
+      }
+      return {
+        projectGraph: await readCachedGraphAndHydrateFileMap(),
+        sourceMaps,
+      };
     }
     lock.lock();
     try {
diff --git a/packages/nx/src/utils/file-lock.ts b/packages/nx/src/utils/file-lock.ts
index 4f7fd2e8e94e9..2e8046cd44e22 100644
--- a/packages/nx/src/utils/file-lock.ts
+++ b/packages/nx/src/utils/file-lock.ts
@@ -1,4 +1,5 @@
-import { existsSync, rmSync, watch, writeFileSync } from 'fs';
+import { existsSync, rmSync, watch, writeFileSync, mkdirSync } from 'fs';
+import { dirname } from 'path';
 
 export class FileLock {
   locked: boolean;
@@ -6,7 +7,10 @@ export class FileLock {
   private lockFilePath: string;
   lockPromise: Promise<void>;
 
-  constructor(private file: string) {
+  constructor(file: string) {
+    // Ensure the directory exists
+    mkdirSync(dirname(file), { recursive: true });
+
     this.lockFilePath = `${file}.lock`;
     this.locked = existsSync(this.lockFilePath);
   }
@@ -16,7 +20,7 @@ export class FileLock {
       throw new Error(`File ${this.lockFilePath} is already locked`);
     }
     this.locked = true;
-    writeFileSync(this.file, '');
+    writeFileSync(this.lockFilePath, '');
   }
 
   unlock() {
@@ -24,26 +28,35 @@ export class FileLock {
       throw new Error(`File ${this.lockFilePath} is not locked`);
     }
     this.locked = false;
-    rmSync(this.file);
+    try {
+      rmSync(this.lockFilePath);
+    } catch (err) {
+      if (err.code !== 'ENOENT') {
+        throw err;
+      }
+    }
   }
 
   wait(timeout?: number) {
     return new Promise<void>((res, rej) => {
       try {
+        // If the file watcher is supported, we can use it to wait for the lock file to be deleted.
         let watcher = watch(this.lockFilePath);
-
         watcher.on('change', (eventType) => {
-          if (eventType === 'delete') {
+          // For whatever reason, the node file watcher can sometimes
+          // emit rename events instead of delete events.
+          if (eventType === 'delete' || eventType === 'rename') {
             this.locked = false;
-            res();
             watcher.close();
+            res();
           }
         });
       } catch {
         // File watching is not supported
         let start = Date.now();
-        setInterval(() => {
-          if (!this.locked || !existsSync(this.file)) {
+        let interval = setInterval(() => {
+          if (!this.locked || !existsSync(this.lockFilePath)) {
+            clearInterval(interval);
             res();
           }