Image simulation for microscopy and lithography systems This MATLAB package provides accurate algorithms for simulation of images produced by coherent, incoherent (fluorescence), and partially coherent microscopy methods. Arial images projected by optical lithography systems can also be simulated. Paper describing the choice of algorithms and their accuracy is here: https://www.osapublishing.org/boe/abstract.cfm?uri=boe-5-6-1822
Documentation about the software itself is here: https://code.google.com/archive/p/microlith/