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Copy pathTsuprem4_MA-R-TRY.inp
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Tsuprem4_MA-R-TRY.inp
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$ This code has DrDc model to simulatin SiGe interdiffusion
$ it takes as-grown SIMS data as input, simulates and compares annealed data vs. model prediction
$ It may also include dopant diffusion
$ Set the filenames and annealing parameters
assign name=T n.val=1000
assign name=AnnealTime n.val=70/60
assign name=Gefactor n.val=1.0
assign name=Cfactor n.val=0.02
assign name=XgeSubstrate n.val=0.00
assign name=GeInput c.val=MA-R_Ge_cut.txt
assign name=GeAnnealed c.val=MBA_Ge.txt
assign name=PInput c.val=MA-R_P_cut.txt
assign name=PAnnealed c.val=MBA_P.txt
assign name=CInput c.val=MA-R_C_cut.txt
assign name=CAnnealed c.val=MBA_C.txt
$-------------define mesh -----------------------
line x loc=0 spacing=0.001
line x loc=0.01 spacing=0.01
line y loc=0 spacing=0.001
line y loc=0.06 spacing=0.0002
line y loc=0.16 spacing=0.0002
line y loc=0.23 spacing=0.001
init boron=1e15 material=silicon
method st.histo ^skip.sil viscoela
method PD.5STR
method ^dif.adap
$--------------------------------------------------
select z=1 title='mesh'
plot.2d grid x.min=-0.01 x.max=0.01 y.min=0 y.max=0.20 c.grid=2
$---------------------------------------
$$This plot is effective
$ Define Ge as new impurity and method
impurity name=Ge new
method variable=Ge none abs.err=0.1
profile impurity=Ge inf=@GeInput
select z=Ge title='DrDc modeling T=@T C @AnnealTime mins '
PLOT.1D x.min=0.00 x.max=0.25 y.min=0 y.max=1.5e22 LINE.TYP=2 COLOR=1
$ ---- define interdiffusion model and parameters
intermed name=Xge express=Ge/5e22
intermed name=Xge0 value=@XgeSubstrate
intermed name=b1 value=8.1
intermed name=b2 value=23
intermed name=D00 value=310*@Gefactor
intermed name=Eav value=4.66
intermed name=D01 express=D00*exp(-Eav/kT)
intermed name=D02 value=D01*exp(b1*Xge0)
intermed name=D express=(Xge<=Xge0 ? D01*exp(b1*Xge):D02*exp(b2*(Xge-Xge0)))
equation variable=Ge mat=Si addtoexp=DIV(D*GRAD(Ge))
$------------------------------------------
$ Define C Model
$impurity name=Cnew new
$method variable=Cnew none abs.err=0.1
PROFILE impurity=carbon IN.FILE=@CInput
SELECT Z=LOG10(carbon)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=16 y.max=20 LINE.TYP=2 COLOR=2
IMPURITY IMP=CARBON MAT=SILICON MODEL=Cscale DI.FAC=@Cfactor
METHOD MODEL=Cscale ENABLE
$ ---- load and plot initial profile
PROFILE PHOSPH IN.FILE=@PInput
SELECT Z=LOG10(PHOSPHORUS)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=16 y.max=20 LINE.TYP=2 COLOR=6
SELECT Z=LOG10(INTERSTITIAL)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=13 y.max=16 LINE.TYP=1 COLOR=5
$ ---- here is the diffusion process step
$diffusion temp=400 t.final=@T time=(@T-400)/100/60 inert
diffusion temp=@T time=@AnnealTime inert
$diffusion temp=@T t.final=400 time=(@T-400)/100/60 inert
$ ---- plot the diffused profile on top of the initial profile
SELECT Z=Ge
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=0 y.max=1.5e22 LINE.TYP=3 COLOR=1
SELECT Z=LOG10(PHOSPHORUS)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=16 y.max=20 LINE.TYP=3 COLOR=2
SELECT Z=LOG10(CARBON)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=16 y.max=20 LINE.TYP=3 COLOR=4
label x=0.13 y=19.3 label="Cscale = @Cfactor"
label x=0.13 y=18.8 label="Local Carbon Effect KGe"
label x=0.13 y=19.8 label="T = @T C"
label x=0.13 y=18.5 label="DrDc X @Gefactor"
label x=0.13 y=18.3 label="Time = @AnnealTime mins"
SELECT Z=PHOSPHORUS
PRINT.1D X.VAL=0 X.MAX=0.22 OUT.FILE=MA-R_cut+C+FI-P-@T-@AnnealTime-min-CDIFAC=@[email protected]
SELECT Z=CARBON
PRINT.1D X.VAL=0 X.MAX=0.22 OUT.FILE=MA-R_cut+C+FI-C-@T-@AnnealTime-min-CDIFAC=@[email protected]
SELECT Z=Ge/5e20
PRINT.1D X.VAL=0 X.MAX=0.22 OUT.FILE=MA-R_cut+C+FI-Ge-@T-@AnnealTime-min-CDIFAC=@[email protected]
$STOP
$-------------------------------------------------------------------------------------------
$ ---- load SIMS data of annealed sample, and overlay with initial and simulation profiles
PROFILE IMPURITY=Ge IN.FILE=@GeAnnealed replace
SELECT Z=Ge
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=0 y.max=1.5e22 LINE.TYP=1 COLOR=1
PROFILE PHOSPHORUS IN.FILE=@PAnnealed replace
SELECT Z=LOG10(PHOSPHORUS)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=16 y.max=20 LINE.TYP=1 COLOR=2
PROFILE IMPURITY=CARBON IN.FILE=@CAnnealed replace
SELECT Z=LOG10(CARBON)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=16 y.max=20 LINE.TYP=1 COLOR=3
SELECT Z=LOG10(INTERSTITIAL)
PLOT.1D ^CLEAR x.min=0.00 x.max=0.25 y.min=13 y.max=16 LINE.TYP=1 COLOR=5
label x=0.14 y=17.5 label="Annealed SIMS" c.line=4 line.typ=1
label x=0.013 y=.4e22 label="SIMS data annealed" c.line=4 line.typ=1