Ca10212

$ This code has DrDc model to simulatin SiGe interdiffusion
$ it takes as-grown SIMS data as input, simulates and compares annealed data vs. model prediction
$ It may also include dopant diffusion
$ Set the filenames and annealing parameters

assign name=T n.val=900
assign name=AnnealTime n.val=10

assign name=CInput         c.val=Ca1_C.txt
assign name=Cannealed      c.val=Ca2_C.txt


$-------------define mesh -----------------------
line x loc=0        spacing=0.01
line x loc=0.01     spacing=0.01

line y loc=0	      spacing=0.001
line y loc=0.1     spacing=0.0002
line y loc=0.3     spacing=0.0002
line y loc=0.4     spacing=0.001

init boron=1e15 material=silicon

method st.histo ^skip.sil viscoela 
method PD.FERMI
method ^dif.adap

$--------------------------------------------------

select z=1 title='mesh'
plot.2d grid x.min=-0.01 x.max=0.01 y.min=0 y.max=0.20 c.grid=2


$------------------------------------------

$ Load Carbon Profile
PROFILE    impurity=CARBON   IN.FILE=@CInput 
SELECT     Z=LOG10(CARBON)
PLOT.1D    x.min=0.00 x.max=0.25 y.min=16  y.max=21 LINE.TYP=1  COLOR=1
intermed  name=XCarbon  express=CARBON/5e22
$Intermed NAME=Ctry express=(1+XCarbon/0.000000002)
Intermed NAME=Ctry express=50
IMPURITY IMP=CARBON MAT=SILICON MODEL=Cscale DI.FAC=Ctry
METHOD   MODEL=Cscale ENABLE

SELECT    Z=LOG10(INTERSTITIAL)
PLOT.1D   x.min=0.00 x.max=0.25 y.min=13 y.max=18   LINE.TYP=1  COLOR=4


$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$
IMPURITY NAME=Cnew NEW 
PROFILE   impurity=Cnew    IN.FILE=@Cannealed 
SELECT    Z=LOG10(Cnew)
PLOT.1D  ^CLEAR x.min=0.00 x.max=0.25 y.min=13 y.max=18   LINE.TYP=1  COLOR=4

label x=0.13 y=18.5  label="T = @T C"               
label x=0.13 y=18.3  label="Time = @AnnealTime mins" 


SELECT     Z=CARBON
PRINT.1D   X.VAL=0 X.MAX=0.22 OUT.FILE=Ca10212PDFERMI-@T-@AnnealTime-min-pd.full.txt

$ ---- here is the diffusion process step 

diffusion temp=@T time=@AnnealTime inert 


$ ---- plot the diffused profile on top of the initial profile

SELECT   Z=LOG10(carbon)
PLOT.1D  ^CLEAR x.min=0.00 x.max=0.25 y.min=13 y.max=18   LINE.TYP=1  COLOR=2

SELECT    Z=LOG10(INTERSTITIAL)
PLOT.1D  ^CLEAR x.min=0.00 x.max=0.25 y.min=13 y.max=18   LINE.TYP=1  COLOR=3